Inenco

Brooks® linija analognih termalnih masenig mjerila protoka je izvedena da ispuni rigorozne zahtjeve u procesnim aplikacijama. Bzr odziv, izvrsna preciznost i jednostavna integracija u sustav.

Pouzdanost.
Analogni I/O omogućuju brzu i jednostavnu integraciju u sistem.
Opcija brtvljenja elastomerom pruža iznimnu nepropusnost i 100% zatvaranje ventila.
Ultra-high purity (UHP) i brtvljenje metal na metal osiguravaju čiste čistoću uređaja (higijenska izvedba) za procese osjetljive na nečistoće.
Globalno odobren za razne primjene

Analog Thermal Mass Flow
Model	Type	Full Scale Capacity	Accuracy	Max Pressure		Max Temp		Input/ Output
Model	Type	Full Scale Capacity	Accuracy	bar	psig	C	F	Input/ Output
5964	UHP Metal Seal Controller	3 sccm - 30 slpm	1% Rate	100	1500	65	150	0-5 Vdc
5965	UHP Metal Seal Controller	0 - 100 slpm	1% Rate	100	1500	65	150	0-5 Vdc
5850EM	Metal Seal Controller	3 sccm - 30 slpm	1% Rate	100	1500	65	150	0-5 Vdc
5851EM	Metal Seal Controller	10 - 100 slpm	1% Rate	100	1500	65	150	0-5 Vdc
5850E	Elastomer Seal Meter/Controller	3 sccm - 30 slpm	1% FS	100	1500	65	150	0-5 Vdc
5851E	Elastomer Seal Meter/Controller	10 - 100 slpm	1% FS	100	1500	65	150	0-5 Vdc
5853E	Elastomer Seal Meter/Controller	100 - 1000 slpm	1% FS	100	1500	65	150	0-5 Vdc
5860E	Elastomer Seal Meter	3 sccm - 30 slpm	1% FS	100	1500	65	150	0-5 Vdc
5861E	Elastomer Seal Meter	10 - 100 slpm	1% FS	100	1500	65	150	0-5 Vdc
5863E	Elastomer Seal Meter	100 - 1000 slpm	1% FS	100	1500	65	150	0-5 Vdc
5850i	Elastomer Seal Meter/Controller	3 sccm - 30 slpm	1% FS	100	1500	65	150	0-5 Vdc, 4-20 mA
5851i	Elastomer Seal Meter/Controller	10 - 100 slpm	1% FS	100	1500	65	150	0-5 Vdc, 4-20 mA
5853i	Elastomer Seal Meter/Controller	100 - 1000 slpm	1% FS	100	1500	65	150	0-5 Vdc, 4-20 mA
5860i	Elastomer Seal Meter	3 sccm - 30 slpm	1% FS	100	1500	65	150	0-5 Vdc, 4-20 mA
5861i	Elastomer Seal Meter	10 - 100 slpm	1% FS	100	1500	65	150	0-5 Vdc, 4-20 mA
5863i	Elastomer Seal Meter	100 - 1000 slpm	1% FS	100	1500	65	150	0-5 Vdc, 4-20 mA
4800 series	Mass Flow Meter/Controller	50 sccm - 40 slpm	±1% FS & ±3% FS	10	150	50	122	0-5 Vdc, 4-20 mA

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Analogna termalna masena mjerila protoka i regulatori

Analog Thermal Mass Flow