The possibility of Brooks Instruments Company
Coriolis Meters & Controllers
The Brooks
® QUANTIM
® Coriolis mass flow meter and mass flow controller offers unsurpassed accuracy and zero stability in critical low flow liquid and gas applications.
- Coriolis mass measurement, which is immune to fluid property variations, provides greater application flexibility and reduces spares requirements
- QUANTIM provides repeatable mass flow measurement and control even under changing conditions
- Multivariable output for mass flow or volumetric flow and density or temperature adds diagnostics capablities and reduces the need for additional instrumentation
- Available in NEMA 1/IP40, NEMA 4X/IP65, explosion proof and ANSI/ISA-76 downport configurations
- Globally approved for a variety of service areas
QUANTIM Precision Mass Flow
|
Model
|
Type
|
Tube
|
Nominal Flow
|
Min Flow
|
Accuracy
|
Max
|
Max
|
Input/
Output
|
Liquid
|
Gas
|
Liquid
|
Pressure
|
Temp
|
(Kg/hr)
|
(slpm)
|
(Kg/hr)
|
bar
|
psig
|
C
|
F
|
|
QMBC
|
Precision Mass
Flow Controller
Gas and Liquid
|
2
3
4
|
0.15
0.78
9.32
|
1.05
2.96
29.1
|
0.001
0.01
0.1
|
±0.2%,
0.5%,
or 1.0% Rate
|
100
|
1500
|
65
|
150
|
0-5 Vdc,
4-20 mA
or Hart
|
Masena mjerila protoka-transmiteri na bazi koriolisovih sila sa regulatorom
Brooks® QUANTIM® mjerilo masenog protoka na bazi Coriolisovih sila i regulator protoka osigurava vanrednu točnost i stabilnost kod kritičnih primjena mjerenja malog protoka tekućina i plinova.
- Coriolis maseno mjerenje protoka, imuno na promjene svojstava tekućine, osigurava veću aplikacijsku fleksibilnost.
- QUANTIM osigurava ponovljivost u mjerenju i kontroli čak pod promijenjivim uvijetima.
- Velike dijagnostičke sposobnosti poput viševarijabilnog izlaza za mjerenje masenog protoka, volumenskog protoka, gustoće i temperature izbacuje potrebu za dodatnim instrumentima.
- Dostupan u NEMA 1/IP40, NEMA 4X/IP65, protueksplozivnoj i ANSI/ISA-76 varijanti.
- Globalno odobren za razne primjene
QUANTIM Precision Mass Flow
|
Model
|
Type
|
Tube
|
Nominal Flow
|
Min Flow
|
Accuracy
|
Max
|
Max
|
Input/
Output
|
Liquid
|
Gas
|
Liquid
|
Pressure
|
Temp
|
(Kg/hr)
|
(slpm)
|
(Kg/hr)
|
bar
|
psig
|
C
|
F
|
QMBM
|
Precision Mass
Flow Meter
Gas and Liquid
|
2
3
4
|
0.19
1.00
13.5
|
1.43
5.60
50.4
|
0.001
0.01
0.1
|
±0.2%,
0.5%,
or 1.0% Rate
|
100
|
1500
|
65
|
150
|
0-5 Vdc,
4-20 mA
or Hart
|
|
ANTIM PQMBrecision Mass Flow
Compact Digital Thermal Mass Flow Meters & Controllers
Brooks offers three series of mass flow controllers/meters for ultra-high purity (UHP) applications. Our UHP devices are designed with a 1.125" wide profile for customers looking for an efficient, space-saving footprint.
Available through the recent acquisition of assets from Celerity, the GF100 is a robust upgrade for standard high purity (HP) mass flow controllers, offering improved accuracy and cleanliness. Optional electrical adapters ensure drop in compatibility with older style analog flow controllers.
Visit our micro-site for more information about the GF100 Series.
The SLA7900 Series has been the workhorse of the industry for several years. Both the B-Series and the SLA7900 Series feature an all-metal flow path, electro-polished to better than five Ra. The all-metal SLA7800 Series is available for non-UHP applications.
Additional features include:
- New coplanar valve offers improved performance to deliver fast, accurate and reliable response across a wide and varying range of differential pressures
- Proprietary valve control algorithm enhances reponse time
- Ultra-high purity (UHP) and metal seal options ensure clean flow paths for contamination sensitive processes
- Available with traditional analog or digital I/O
- Globally approved for a variety of service areas
Compact Digital Thermal Mass Flow
|
|
|
Full Scale
|
|
Max Pressure
|
Max Temp
|
Input/
Output
|
Model
|
Type
|
Capacity
|
Accuracy
|
bar
|
psig
|
C
|
F
|
B900 SERIES
|
UHP Metal Seal
Meter/Controller
|
3 sccm - 50 lpm
|
±0.7% Rate
|
6
|
85
|
70
|
158
|
0-5 Vdc,
4-20 mA,
DeviceNet™,
RS-485
|
SLA 7900 SERIES
|
UHP Metal Seal
Meter/Controller
|
3 sccm - 50 slpm
|
1% Rate
|
100
|
1500
|
65
|
150
|
0-5 Vdc,
4-20 mA,
DeviceNet™,
RS-485
|
|
|
|
SLA 7800 SERIES
|
Metal Seal
Meter/Controller
|
3 sccm - 50 slpm
|
1% Rate
|
100
|
1500
|
65
|
15
0
|
0-5 Vdc,
4-20 mA,
DeviceNet™,
RS-485
|
Digital Thermal Mass Flow Meters & Controllers
The Brooks
® line of digital thermal mass flow instruments offers faster response, better accuracy and improved control over traditional analog devices.
- Industry leading repeatability ensures a stable process even under changing conditions
- Self diagnostics and alarms eliminate downtime
- Multiple communication protocols allow easy integration into many control systems
- Elastomer seal option provides exceptional leak integrity and maximizes control valve shutoff dependability
- Ultra-high purity (UHP) and metal seal options ensure clean flow paths for contamination sensitive processes
- Available with traditional analog or digital I/O
- Globally approved for a variety of service areas
Digital Thermal Mass Flow
|
|
|
Full Scale
|
|
Max Pressure
|
Max Temp
|
Input/
Output
|
Model
|
Type
|
Capacity
|
Accuracy
|
bar
|
psig
|
C
|
F
|
SLA 5800 SERIES
|
Elastomer Seal
Meter/Controller
|
3 sccm - 2500 slpm
|
0.7% Rate
& 0.2% FS
|
300
|
4500
|
65
|
150
|
0-5 Vdc, 4-20mA,
DeviceNet™,
FOUNDATION fieldbus™,
RS-485
|
5800S SERIES
|
Mass Flow
Meter/Controller
|
3 sccm - 2500 slpm
|
0.7% Rate
& 0.2% FS
|
300
|
4500
|
65
|
150
|
0-5 Vdc, 4-20mA,
RS-232/485
|
|
|
|
4800 SERIES
|
|
Mass Flow
Meter/Controller
|
50 sccm - 40 slpm
|
±1% FS
& ±3% FS
|
10
|
150
|
50
|
122
|
0-5 Vdc
4-20 mA
|
Analog Thermal Mass Flow Meters & Controllers
The Brooks
® line of analog thermal mass flow instruments is designed to meet the rigorous demands of our customers’ established and newly developing process applications. These devices continue to add to their expansive installed base due to their fast response, excellent accuracy and simple integration.
- Years of field-proven reliability
- Analog I/O allows for quick and easy system integration
- Elastomer seal option provides exceptional leak integrity and maximizes control valve shutoff dependability
- Ultra-high purity (UHP) and metal seal options ensure clean flow paths for contamination sensitive processes
- Globally approved for a variety of service areas
|
|
Full Scale
|
|
Max Pressure
|
Max Temp
|
Input/
Output
|
Model
|
Type
|
Capacity
|
Accuracy
|
bar
|
psig
|
C
|
F
|
|
5964
|
UHP Metal Seal Controller
|
3 sccm - 30 slpm
|
1% Rate
|
100
|
1500
|
65
|
150
|
0-5 Vdc
|
5965
|
UHP Metal Seal Controller
|
0 - 100 slpm
|
1% Rate
|
100
|
1500
|
65
|
150
|
0-5 Vdc
|
|
|
|
5850 EM
|
Metal Seal Controller
|
3 sccm - 30 slpm
|
1% Rate
|
100
|
1500
|
65
|
150
|
0-5 Vdc
|
|
|
|
5851 EM
|
Metal Seal Controller
|
10 - 100 slpm
|
1% Rate
|
100
|
1500
|
65
|
150
|
0-5 Vdc
|
|
|
|
5850 E
|
Elastomer Seal
Meter/Controller
|
3 sccm - 30 slpm
|
1% FS
|
100
|
1500
|
65
|
150
|
0-5 Vdc
|
|
|
|
5851 E
|
Elastomer Seal
Meter/Controller
|
10 - 100 slpm
|
1% FS
|
100
|
1500
|
65
|
150
|
0-5 Vdc
|
|
|
|
5853 E
|
Elastomer Seal
Meter/Controller
|
100 - 1000 slpm
|
1% FS
|
100
|
1500
|
65
|
150
|
0-5 Vdc
|
|
|
|
5860 E
|
Elastomer Seal Meter
|
3 sccm - 30 slpm
|
1% FS
|
100
|
1500
|
65
|
150
|
0-5 Vdc
|
|
|
|
5861 E
|
Elastomer Seal Meter
|
10 - 100 slpm
|
1% FS
|
100
|
1500
|
65
|
150
|
0-5 Vdc
|
|
|
|
5863 E
|
Elastomer Seal Meter
|
100 - 1000 slpm
|
1% FS
|
100
|
1500
|
65
|
150
|
0-5 Vdc
|
|
|
|
5850 i
|
Elastomer Seal
Meter/Controller
|
3 sccm - 30 slpm
|
1% FS
|
100
|
1500
|
65
|
150
|
0-5 Vdc,
4-20 mA
|
|
|
|
5851 i
|
Elastomer Seal
Meter/Controller
|
10 - 100 slpm
|
1% FS
|
100
|
1500
|
65
|
150
|
0-5 Vdc,
4-20 mA
|
|
|
|
5853 i
|
Elastomer Seal
Meter/Controller
|
100 - 1000 slpm
|
1% FS
|
100
|
1500
|
65
|
150
|
0-5 Vdc,
4-20 mA
|
|
|
|
5860 i
|
Elastomer Seal Meter
|
3 sccm - 30 slpm
|
1% FS
|
100
|
1500
|
65
|
150
|
0-5 Vdc,
4-20 mA
|
|
|
|
5861 i
|
Elastomer Seal Meter
|
10 - 100 slpm
|
1% FS
|
100
|
1500
|
65
|
150
|
0-5 Vdc,
4-20 mA
|
|
|
|
5863 i
|
Elastomer Seal Meter
|
100 - 1000 slpm
|
1% FS
|
100
|
1500
|
65
|
150
|
0-5 Vdc,
4-20 mA
|
|
|
|
4800 SERIES
|
Mass Flow
Meter/Controller
|
50 sccm - 40 slpm
|
±1% FS
& ±3% FS
|
10
|
150
|
50
|
122
|
0-5 Vdc
4-20 mA
|
NEMA 4X / IP66 Thermal Mass Flow Meters & Controllers
The Brooks
® Mf™ Series mass flow line is designed specifically for use in harsh environments. These devices' unique enclosures provide protection from dust and water making them ideal for indoor or outdoor use.
- NEMA 4X/IP66 ratings affords washdown protection eliminating the need for secondary enclosures
- Industry leading repeatability ensures a stable process even under changing conditions
- Self diagnostics and alarms eliminate downtime
- Analog and digital versions allow simple integration into any control system
- Flow rates up to 36,000 lpm (meter) available to meet high flow industrial process requirements
- EX-Series products feature remote electronics and are certified for Zone 1 hazardous areas
- Globally approved for a variety of service areas
NEMA 4X/IP66 Thermal Mass Flow
|
|
|
Full Scale
|
|
Max Pressure
|
Max Temp
|
Input/
Output
|
Model
|
Type
|
Capacity
|
Accuracy
|
bar
|
psig
|
C
|
F
|
SLA Mf SERIES
|
Digital
Meter/Controller
|
3 sccm - 2500 slpm
|
0.7% Rate
and
0.2% FS
|
100
|
1500
|
65
|
150
|
0-5 Vdc,
4-20 mA,
FOUNDATION fieldbus™,
RS-485
|
Mf-S SERIES
|
Smart Mass Flow
Meter/Controller
|
3 sccm - 36000 slpm
|
0.7% Rate
and
0.2% FS
|
100
|
1500
|
65
|
150
|
0-5 Vdc,
4-20 mA,
RS-232/485
PROFIBUS DP®
|
|
|
|
Mfi SERIES
|
Analog
Meter/Controller
|
3 sccm - 1000 slpm
|
1% FS
|
100
|
1500
|
65
|
150
|
0-5 Vdc,
4-20 mA
|
|
|
|
MfX SERIES
|
Analog
Meter/Controller
|
3 sccm - 1000 slpm
|
1% FS
|
100
|
1500
|
65
|
150
|
0-5 Vdc,
4-20 mA
|
Analog & Digital Pressure Controllers
The Brooks
® line of pressure instruments utilizes Brooks' superior mass flow designs and applies them to process pressure. With a wide variety of control and configuration options, Brooks is certain to have the right pressure instrument for your application.
- Pressure controllers have options that accurately control upstream or downstream pressure
- Remote transducers take an input from an external pressure device and adjust process flow
- 1-1/8" and 1-1/2" footprint models
- Ultra high purity (UHP), metal seal or elastomer seal options
- Available with analog or digital I/O
- Globally approved for a variety of service area
|
|
Full Scale
|
|
Max Pressure
|
Max Temp
|
Input/
Output
|
Model
|
Type
|
Capacity
|
Accuracy
|
bar
|
psig
|
C
|
F
|
Pressure Controllers:
|
SLA 7810/20
|
Metal Seal, 1-1/8"
|
0-20 bar/ 290 psia
|
±0.5% FS
|
20
|
290
|
65
|
150
|
0-5 Vdc,
DeviceNet™
|
SLA 5810/20
|
Elastomer Seal
|
0-100 bar/ 1500 psia
|
0.5% FS
|
100
|
1500
|
65
|
150
|
0-5 Vdc,
DeviceNet™,
FOUNDATION fieldbus™
|
|
|
|
5866 M
|
Metal Seal
|
0-300 bar/4500 psi
|
0.5% FS
|
300
|
4500
|
65
|
150
|
0-5 Vdc,
4-20 mA
|
|
|
|
5866 E
|
Elastomer Seal
|
0-300 bar/4500 psi
|
0.5% FS
|
20
|
290
|
65
|
150
|
0-5 Vdc,
4-20 mA
|
|
|
|
Remote Transducer/Pressure Controllers/Flow Meters:
|
|
|
|
5866 RT
|
Elastomer Seal
|
3 sccm - 30 slpm
|
1% Rate
|
100
|
1500
|
65
|
150
|
0-5 Vdc
|
|
|
|
SLA 5840
|
Elastomer Seal
|
3 sccm - 30 slpm
|
1% Rate
|
100
|
1500
|
65
|
150
|
0-5 Vdc,
DeviceNet™
|
|
|
|
SLA 7840
|
Metal Seal, 1-1/8"
|
3 sccm - 30 slpm
|
1% Rate
|
100
|
1500
|
65
|
150
|
0-5 Vdc,
DeviceNet™
|
Mass Flow Software Tools & Secondary Electronics
Brooks
® provides a variety of software and accessory options to ensure mass flow controllers perform at their best. Calibration and control software, as well as certified calibration standards, allow customers to perform calibration checks to verify accuracy and repeatability.
- Simple software programs give access to tuning, alarms and other basic functions
- More rigorous programs available for configuration, calibration and advanced service
- Secondary electronics units available for up to four channels offer easy visual indication, control of flow, and also provide external power
Software Tools
|
Type
|
Functionality (See data sheet for applicable models)
|
Brooks Service Suite, Standard
|
Provides access to I/O tuning, alarm indication/configuration, diagnostics, selected response tuning, control and monitor.
Click here for software download. For instruction manuals, see software tools in the documentation section.
|
Brooks Service Suite, Pro
|
Provides access to I/O tuning, alarm indication/configuration, diagnostics, selected response tuning, control and monitor, plus calibration and accuracy reporting capabilities.
Click here for software download. For instruction manuals, see software tools in the documentation section.
|
Brooks Smart DDE
Manual
|
Brooks Smart DDE Software allows bi-directional links between Windows®-based applications and Brooks Smart mass flow products.
|
ProLink® II Software
Manual
|
Micro Motion Transmitter configuration software tool for QUANTIM Model QMBS Coriolis sensor products. Facilitates configuration, commissioning, troubleshooting and diagnostics.
|
|
Secondary Electronics
|
Model
|
Channels
|
Additional
Functions
|
Control I/O
|
Power Input
|
Power Output
|
0254
|
4
|
Totalizer & Blending
RS-232 VO for
remote control
|
0 (1)-5 Vdc,
0 (2)-10 Vdc,
0 (4)-20 mA
|
100-240 Vac, 50/60 Hz
|
±15 Vdc, 24 Vdc
|
Armored Variable Area Meters
The Brooks
® line of rugged metal tube variable area meters (rotameters) is ideal for high pressure, high temperature and other demanding flow applications where safety is a concern.
- Globally approved for use in hazardous environments
- Needle valves for flow control
- Multiple connection options to match your existing system and provide easy installation
- Many corrosion resistant material options for the metering of agressive fluids
- HART and 4-20mA outputs provide for remote flow monitoring
- Excellent meter repeatability provides consistent batch and/or process production
- No power required which reduces installation cost and provides flow measurement in hazardous area
- Low-pressure drop allows for economical pump selection
|
Capacity
-Water
|
Capacity
-Air
|
Accuracy
|
Max
Pressure
|
Temp
|
|
Model
|
lph
|
gpm
|
m3n/hr
|
scfm
|
Rate
|
bar
|
psig
|
C
|
F
|
Output
|
MT3809
|
25
to
100000
|
.11
to
440
|
0.78
to
1404
|
0.49
to
888
|
2%
|
103
|
1500
|
-29
to
325
|
-20
to
617
|
Alarm and/or
4-20 mA, HART
(IS or X-Proof)
|
MT3819
|
110
to
15000
|
0.48
to
66
|
3.2
to
435
|
2
to
275
|
2%
|
19
|
275
|
-29
to
150
|
-20
to
300
|
Alarm and/or
4-20 mA, HART
(IS or X-Proof)
|
|
MT3810
|
25
to
20000
|
0.11
to
88
|
0.78
to
620
|
0.49
to
392
|
5%
|
103
|
1500
|
-29
to
215
|
-20
to
420
|
Alarm and/or
4-20 mA, HART
(IS or X-Proof)
|
|
3600 SERIES
|
18
to
11355
|
0.08
to
50
|
0.65
to
43
|
0.38
to
28
|
10%
|
103
|
1500
|
-29
to
204
|
-20
to
400
|
Alarm
(IS or X-Proof)
|
|
3750
|
0.8
to
100
|
.003
to
44
|
.04
to
3.1
|
.02
to
2
|
5%
|
275
|
4000
|
-29
to
204
|
-20
to
400
|
Alarm and/or
4-20 mA
(IS or X-Proof)
|
Glass Tube Variable Area Meters
The Brooks
® line of reliable glass tube variable area (rotameters) is ideal for many gas and liquid flow measuring applications where viewing the process is important.
- Rugged, vented polycarbonate tube enclosure available on most models
- Tube and float can be re-ranged in line therefore minimizing process down time
- Rotatable connections for easy installation at any angle
- Packing gland or O-ring sealing to meet piping requirements or customer preference
- Globally approved for use in hazardous environments
- Reliable – only one moving part
- No power required which reduces installation cost and provides flow measurement in hazardous areas
- Low-pressure drop allows for economical pump selection
|
Capacity
-Water
|
Capacity
-Air
|
Accuracy
|
Max
Pressure
|
Temp
|
|
|
Model
|
lph
|
gpm
|
m3n/hr
|
scfm
|
Rate
|
bar
|
psig
|
C
|
F
|
Output
|
|
GT1000
|
0.024
to
22392
|
0.0001
to 98
|
0.002
to 431
|
0.001
to 273
|
2% FS
|
34
|
500
|
1
to
121
|
33
to
250
|
Alarm (IS)
|
|
1100 SERIES
|
0.032
to
29300
|
0.0001
to 129
|
0.002
to 342
|
0.001
to 217
|
2% FS
|
34
|
500
|
1
to
121
|
33
to
250
|
Local
Indication
Only
|
|
1306
|
31
to
2205
|
0.14
to 9.7
|
1.2
to 66
|
0.8
to 42
|
3% FS
|
24
|
350
|
1
to
121
|
33
to
250
|
Local
Indication
Only
|
|
1307
|
39
to
20900
|
0.17
to 92
|
1.5
to 342
|
0.9
to 217
|
2% FS
|
24
|
350
|
1
to
121
|
33
to
250
|
Local
Indication
Only
|
|
1305
|
182
to
11355
|
0.8
to 50
|
4.7
to 79
|
3
to 50
|
10% FS
|
14
|
200
|
1
to
121
|
33
to
250
|
|
Purgemeters
The Brooks
® Model 1350 and 1355 Sho-Rate™ variable area meters deliver industry-leading performance for gas or liquid flows. Their robust, proven engineering ensures reliable indication and unsurpassed service life. Sho-Rate meters pioneered the concept of field-replaceable tube and float kits. If necessary, the tube and float can be replaced in-line in a matter of minutes. Brooks also offers low cost meters in glass, acrylic and polycarbonate tube configurations for less critical applications.
- ntegral needle valves on inlet or outlet
- Integral flow controller that compensates for varying inlet or outlet pressures
- 316 stainless, brass or aluminum construction
- compact, space saving size
|
Capacity
-Water
|
Capacity
-Air
|
Accuracy
|
Max
Pressure
|
Temp
|
|
Model
|
lph
|
gph
|
m3n/hr
|
scfm
|
Rate
|
bar
|
psig
|
C
|
F
|
Construction
|
1350
|
|
0.032
to
114
|
0.006
to
30
|
0.002
to
3.7
|
0.001
to
2.33
|
10% FS
|
14
|
200
|
1
to
121
|
33
to
250
|
Glass Tube w/
Aluminum,
Brass or 316 SS
|
1355
|
0.032
to
114
|
0.006
to
30
|
0.002
to
3.7
|
0.001
to
2.33
|
5% FS
|
14
|
200
|
1
to
121
|
33
to
250
|
Glass Tube w/
Aluminum,
Brass or 316 SS
|
|
1358
|
182
to
1136
|
48
to
300
|
5.4
to
23.6
|
3.4
to
15
|
10% FS
|
14
|
200
|
1
to
121
|
33
to
250
|
Glass Tube
w/ Brass or
316 SS
|
|
1510
|
0.032
to
114
|
0.006
to
30
|
0.002
to
3.7
|
0.001
to
2.33
|
10% FS
|
14
|
200
|
1
to
121
|
33
to
250
|
Glass Tube w/
316 SS
|
|
2001
|
1
to
72
|
0.25
to
270
|
NA
|
0.03
to
15
|
10% FS
|
7
|
100
|
1
to
71
|
33
to
160
|
Acrylic Tube
w/Brass or
316 SS
|
|
2700
|
1.5
to
80
|
0.4
to
20
|
0.5
to
18.5
|
0.05
to
1.7
|
10% FS
|
7
|
100
|
1
to
54
|
33
to
130
|
Polycarbonate
Tube w/
Brass or 316 SS
|
OEM Products
Brooks
® OEM products provide high-performing, cost effective solutions for OEM applications. Some of the OEM customers that we serve include medical device manufacturers, suppliers of gas blending equipment, vacuum pump makers and industrial processing equipment suppliers. In addition to the products shown here, Brooks can customize any standard product to meet OEM requirements.
- Compact thermal mass flow meters and controllers
- Needle valves for precise flow control
- Compact pressure regulators
- Flow controllers for variable upstream or downstream pressures
- Customized variable area, thermal mass, and Coriolis flow controllers and pressure products
- Private labeling available
Valves, Flow Controllers & Pressure Regulators
|
|
Capacity
-Water
|
Capacity
-Air
|
Max
Pressure
|
Temp
|
|
Model
|
lph
|
gph
|
1u/hr
|
scfh
|
bar
|
psig
|
C
|
F
|
Construction
|
FC8800/8900 SERIES
|
|
0.025
to
1820
|
0.025
to 480
|
0.52 to
56000
|
0.02
to
2130
|
68
|
1000
|
1
to
149
|
33
to
300
|
Brass/316SS
|
FC8744
|
|
5
to
2000 sccm He
|
20
|
300
|
1
to
149
|
33
to
300
|
Aluminum
|
|
|
FC8844/8944
|
|
150
to
55000 sccm He
|
20
|
300
|
1
to
149
|
33
to
300
|
316SS
|
|
|
8601
|
|
3
to
1000 sccm
|
17
|
250
|
1
to
60
|
33
to
140
|
Aluminum/
316SS
|
|
|
8500 SERIES
|
0.24
to
39
|
0.02
to 10
|
8 to
1500
|
0.3
to
57
|
68
|
1000
|
1
to
121
|
33
to
250
|
Brass/316SS
|
|
|
|
|
|
|
Thermal Mass Flow Products
|
|
|
Full Scale
|
|
Max Pressure
|
Max Temp
|
Input/
Output
|
Model
|
Type
|
Capacity
|
Accuracy
|
bar
|
psig
|
C
|
F
|
5850TR
|
Mass Flow Controller
|
10 sccm - 20 slpm
|
1% FS
|
300
|
4500
|
65
|
150
|
0-5 Vdc,
4-20 mA
|
5700
|
Mass Flow Meter
|
10 sccm - 50 slpm
|
5% FS
|
10
|
150
|
65
|
150
|
0-5 Vdc
|
|
|
|
4800 SERIES
|
Mass Flow
Meter/Controller
|
50 sccm - 40 slpm
|
±1% FS
& ±3% FS
|
10
|
150
|
50
|
122
|
0-5 Vdc
4-20 mA
|
|
Vaporizer Systems
A Brooks vaporizer system provides 100% vaporization and repeatable, uniform, particle-free films. It can mix up to three fluid streams and is the only system robust enough to handle low vapor pressure and thermally sensitive fluids. With a dynamic flow range of less than 10 grams/hr to greater than 10 kg/hr and Coriolis-based mass flow control, this system is truly unique.
Our reliable, modern vaporization solutions are superior to flash vaporizers and bubbler (vapor draw) systems and have been proven in many applications such as chemical vapor deposition (CVD), metal oxide chemical vapor deposition (MOCVD), advanced material deposition in the semiconductor industry, vaporizing monomers for vacuum polymer film deposition, creating thin films for enhanced thermal, optical, or hardness characteristics (e.g. Diamond-like coatings), generating calibration vapor for continuous emission monitoring systems, and more.
Let Brooks help you estimate the economic benefits of replacing an inefficient bubbler or flash vaporizer system. The results will be compelling.
Mechanical Level Gauges
The robust Brooks magnetic level gauges provide reliable liquid level measurement through the use of a proven magnetic float technology which does not require external power. As a result, plant engineers can continue to monitor material levels despite planned or unplanned power cuts. Optional alarms and transmitters are available to permit remote monitoring as well.