Digital Thermal Mass Flow |
Model |
Type |
Full Scale Capacity |
Accuracy |
Max Pressure |
Max Temp |
Input/ Output |
bar |
psig |
C |
F |
SLA5800 Series |
Elastomer Seal Meter/Controller |
3 sccm - 2500 slpm |
0.7% Rate
& 0.2% FS |
300 |
4500 |
65 |
150 |
0-5 Vdc, 4-20mA, DeviceNet™, FOUNDATION fieldbus™, RS-485 |
5800S Series |
Mass Flow Meter/Controller |
3 sccm - 2500 slpm |
0.7% Rate
& 0.2% FS |
300 |
4500 |
65 |
150 |
0-5 Vdc, 4-20mA, RS-232/485 |
4800 Series |
Mass Flow Meter/Controller |
50 sccm - 40 slpm |
±1% FS
& ±3% FS |
10 |
150 |
50 |
122 |
0-5 Vdc 4-20 mA |